Figure 2 (a): In-plane GISAXS patterns (a) of MSF, ZnO 41 nm in MSF and ZnO 19 nm in MSF.The incident angles was 0.30°.

Columns x1 and y1  In-plane GISAXS spectra of mesoporous silica film surfactnat extracted
Columns x2 and y2  In-plane GISAXS spectra of mesoporous silica film modified with ALD of ZnO 41 nm
Columns x3 and y3  In-plane GISAXS spectra of mesoporous silica film modified with ALD of ZnO 19 nm

x1      y1               x2      y2              x3      y3
1	1610.0206	1	1875.54	        1	2015.5938
1.02	1548.049	1.02	1669.3207	1.02	1894.817
1.04	1439.4991	1.04	1649.3286	1.04	1817.3083
1.06	1510.1193	1.06	1576.6211	1.06	1823.7028
1.08	1352.2174	1.08	1553.8658	1.08	1719.2369
1.1	1410.7408	1.1	1490.4144	1.1	1725.7667
1.12	1343.3351	1.12	1492.0916	1.12	1604.9792
1.14	1350.9768	1.14	1409.8311	1.14	1592.0259
1.16	1226.953	1.16	1431.8044	1.16	1576.4694
1.18	1233.3247	1.18	1450.8063	1.18	1602.933
1.2	1203.9481	1.2	1346.7062	1.2	1487.1637
1.22	1290.7524	1.22	1302.5181	1.22	1469.7339
1.24	1188.1299	1.24	1270.6854	1.24	1457.6288
1.26	1192.6638	1.26	1299.9674	1.26	1340.6044
1.28	1192.6794	1.28	1200.9084	1.28	1487.62
1.3	1163.3309	1.3	1193.2925	1.3	1386.5428
1.32	1150.1639	1.32	1152.9811	1.32	1309.6052
1.34	1116.0958	1.34	1140.0708	1.34	1342.1644
1.36	1183.8496	1.36	1132.8414	1.36	1352.6581
1.38	1147.4817	1.38	1096.1281	1.38	1343.2509
1.4	1174.9863	1.4	1050.9498	1.4	1295.4269
1.42	1094.582	1.42	1057.1188	1.42	1313.061
1.44	1122.8834	1.44	1052.4662	1.44	1250.83
1.46	1125.3052	1.46	1042.0972	1.46	1268.4531
1.48	1113.9542	1.48	1096.1787	1.48	1252.9346
1.5	1142.5291	1.5	1009.6634	1.5	1300.2369
1.52	1207.3224	1.52	1029.261	1.52	1277.4291
1.54	1128.0389	1.54	1023.9244	1.54	1221.3446
1.56	1232.5083	1.56	1028.7008	1.56	1251.9059
1.58	1127.1267	1.58	965.5421	1.58	1124.4596
1.6	1142.5303	1.6	946.0237	1.6	1187.1337
1.62	1195.9374	1.62	969.1908	1.62	1228.0637
1.64	1221.3809	1.64	994.5248	1.64	1203.1306
1.66	1278.203	1.66	981.582	1.66	1190.4008
1.68	1265.0219	1.68	921.4779	1.68	1228.791
1.7	1202.4086	1.7	934.0466	1.7	1173.6871
1.72	1343.9994	1.72	906.0587	1.72	1186.3063
1.74	1315.9799	1.74	896.3439	1.74	1176.3584
1.76	1365.1151	1.76	940.9644	1.76	1196.8766
1.78	1377.5865	1.78	854.1663	1.78	1161.1691
1.8	1478.7972	1.8	904.2498	1.8	1158.3197
1.82	1512.9668	1.82	914.7672	1.82	1141.8398
1.84	1493.2094	1.84	910.5688	1.84	1162.226
1.86	1663.6903	1.86	899.6996	1.86	1050.5397
1.88	1632.6627	1.88	861.7172	1.88	1131.825
1.9	1767.11	1.9	862.0292	1.9	1098.8726
1.92	1796.3285	1.92	849.2274	1.92	1125.9697
1.94	1866.2499	1.94	895.5734	1.94	1144.6222
1.96	1925.076	1.96	886.1628	1.96	1092.4635
1.98	1937.7896	1.98	869.4537	1.98	1102.3547
2	2022.1127	2	875.5933	2	1054.3158
2.02	2164.7935	2.02	821.1226	2.02	1101.3965
2.04	2215.7144	2.04	815.67	2.04	1062.174
2.06	2291.1709	2.06	812.9413	2.06	1037.839
2.08	2348.0996	2.08	832.4179	2.08	1083.7863
2.1	2340.9226	2.1	810.2462	2.1	1124.8304
2.12	2361.157	2.12	774.9345	2.12	1075.0339
2.14	2306.8435	2.14	786.9052	2.14	1073.9971
2.16	2395.6843	2.16	719.009	2.16	1032.9767
2.18	2325.0625	2.18	719.3208	2.18	948.9468
2.2	2308.2356	2.2	705.7575	2.2	1020.0115
2.22	2289.8682	2.22	716.3447	2.22	1000.9587
2.24	2205.7937	2.24	752.1147	2.24	1002.9805
2.26	2119.6423	2.26	726.8984	2.26	966.1287
2.28	2065.9343	2.28	703.0864	2.28	917.5956
2.3	1867.2708	2.3	766.9509	2.3	964.7996
2.32	1806.1243	2.32	752.5602	2.32	898.9418
2.34	1626.603	2.34	733.4769	2.34	892.7932
2.36	1702.2584	2.36	628.8651	2.36	888.0377
2.38	1477.1357	2.38	655.4612	2.38	871.3038
2.4	1343.7258	2.4	648.7505	2.4	829.4922
2.42	1292.4084	2.42	639.4737	2.42	813.571
2.44	1190.2527	2.44	680.9935	2.44	838.4835
2.46	1237.9716	2.46	636.0469	2.46	819.6838
2.48	1096.6863	2.48	640.5859	2.48	883.9446
2.5	1057.1025	2.5	602.4905	2.5	782.8691
2.52	1026.3302	2.52	609.7942	2.52	727.4733
2.54	947.0022	2.54	576.1133	2.54	762.2197
2.56	899.5861	2.56	586.5699	2.56	698.3857
2.58	840.1565	2.58	562.5444	2.58	736.706
2.6	844.1888	2.6	546.1697	2.6	679.7064
2.62	778.9047	2.62	598.5748	2.62	678.3197
2.64	755.0416	2.64	559.3881	2.64	648.8818
2.66	742.3593	2.66	528.5357	2.66	683.4822
2.68	716.6176	2.68	536.6499	2.68	599.8895
2.7	703.5883	2.7	521.0626	2.7	614.5569
2.72	688.3162	2.72	479.2079	2.72	601.3245
2.74	616.2285	2.74	455.7798	2.74	622.2788
2.76	604.0923	2.76	477.2549	2.76	564.6707
2.78	609.0958	2.78	507.1407	2.78	575.3369
2.8	566.866	2.8	469.471	2.8	560.0615
2.82	581.0809	2.82	425.8546	2.82	520.7687
2.84	550.9382	2.84	440.3621	2.84	551.128
2.86	496.2402	2.86	492.1528	2.86	532.7296
2.88	544.7812	2.88	448.5363	2.88	540.0283
2.9	501.0929	2.9	445.0836	2.9	552.7054
2.92	464.4164	2.92	433.3618	2.92	523.8405
2.94	442.0861	2.94	405.0879	2.94	488.6069
2.96	486.8268	2.96	405.8274	2.96	509.1676
2.98	435.0072	2.98	423.2988	2.98	447.7506
3	433.3766	3	409.9341	3	478.3799
3.02	406.2572	3.02	427.1949	3.02	419.4737
3.04	424.0286	3.04	403.4588	3.04	461.4376
3.06	393.872	3.06	382.6216	3.06	462.337
3.08	386.2312	3.08	385.1706	3.08	415.6235
3.1	372.0188	3.1	378.4213	3.1	421.3957
3.12	373.4843	3.12	369.3925	3.12	436.4607
3.14	359.4937	3.14	376.0036	3.14	420.9532
3.16	371.474	3.16	373.4317	3.16	414.5421
3.18	365.9839	3.18	365.6057	3.18	364.2145
3.2	358.9153	3.2	348.2437	3.2	381.8089
3.22	343.9653	3.22	363.3899	3.22	434.4084
3.24	361.1479	3.24	362.4023	3.24	410.9854
3.26	356.7003	3.26	322.2733	3.26	415.7276
3.28	326.0944	3.28	380.7298	3.28	374.8198
3.3	351.9123	3.3	317.6658	3.3	416.6959
3.32	308.588	3.32	316.8111	3.32	380.481
3.34	360.2353	3.34	342.3438	3.34	352.702
3.36	311.8797	3.36	328.3347	3.36	369.0906
3.38	340.0864	3.38	316.3467	3.38	363.5548
3.4	342.3654	3.4	334.0608	3.4	342.874
3.42	294.8679	3.42	318.7236	3.42	315.0534
3.44	307.8683	3.44	284.6655	3.44	359.8312
3.46	319.9316	3.46	314.503	3.46	373.3754
3.48	327.6456	3.48	308.4843	3.48	372.8132
3.5	310.7711	3.5	322.1365	3.5	312.9608
3.52	315.1157	3.52	317.5568	3.52	315.7671
3.54	301.1952	3.54	275.6838	3.54	330.4992
3.56	321.845	3.56	263.6363	3.56	305.401
3.58	315.5968	3.58	293.497	3.58	312.6143
3.6	335.664	3.6	288.1545	3.6	315.0587
3.62	307.8805	3.62	278.7756	3.62	338.6187
3.64	319.3672	3.64	295.019	3.64	307.789
3.66	326.5406	3.66	310.7862	3.66	307.3607
3.68	329.5062	3.68	281.4604	3.68	259.177
3.7	316.1758	3.7	290.5932	3.7	287.879
3.72	346.1701	3.72	269.6761	3.72	267.5293
3.74	320.0474	3.74	259.7273	3.74	262.2756
3.76	301.6769	3.76	273.654	3.76	289.6836
3.78	301.0957	3.78	252.7807	3.78	296.6423
3.8	314.9447	3.8	282.998	3.8	253.9787
3.82	323.5607	3.82	277.5465	3.82	284.3138
3.84	293.047	3.84	244.6732	3.84	279.5072
3.86	288.0654	3.86	262.9246	3.86	306.933
3.88	331.3287	3.88	241.6568	3.88	254.6093
3.9	271.8323	3.9	255.503	3.9	275.0201
3.92	299.4298	3.92	236.2338	3.92	275.785
3.94	331.7519	3.94	246.2078	3.94	237.8116
3.96	275.6193	3.96	255.3775	3.96	250.6822
3.98	242.7613	3.98	231.0016	3.98	226.3838
4	323.6302	4	268.8739	4	222.9781
4.02	260.8529	4.02	253.3625	4.02	240.3801
4.04	257.7918	4.04	253.3769	4.04	243.812
4.06	264.5547	4.06	255.3938	4.06	244.3388
4.08	271.0162	4.08	237.0729	4.08	258.6545
4.1	275.0775	4.1	243.5855	4.1	249.1122
4.12	263.2491	4.12	241.972	4.12	239.9658
4.14	274.8317	4.14	221.6316	4.14	223.4656
4.16	271.6831	4.16	199.5658	4.16	232.9639
4.18	238.8114	4.18	218.7708	4.18	192.7523
4.2	236.7527	4.2	217.7758	4.2	211.0117
4.22	270.4089	4.22	235.4146	4.22	248.9237
4.24	238.3952	4.24	207.7902	4.24	192.1855
4.26	271.5008	4.26	219.1866	4.26	189.312
4.28	267.0989	4.28	191.072	4.28	207.6799
4.3	235.3406	4.3	206.2992	4.3	189.5608
4.32	248.2704	4.32	216.7141	4.32	196.65
4.34	223.4453	4.34	197.3812	4.34	216.7655
4.36	251.3741	4.36	182.5295	4.36	197.275
4.38	235.5278	4.38	197.3063	4.38	206.7521
4.4	241.9148	4.4	213.3815	4.4	190.8308
4.42	231.9052	4.42	202.4903	4.42	196.769
4.44	219.3286	4.44	210.9622	4.44	157.5416
4.46	219.2531	4.46	201.8926	4.46	177.525
4.48	206.094	4.48	216.843	4.48	180.8284
4.5	208.4504	4.5	188.7119	4.5	187.6941
4.52	223.4557	4.52	183.3858	4.52	184.8585
4.54	177.3446	4.54	176.1212	4.54	179.7874
4.56	215.3178	4.56	188.9268	4.56	180.1894
4.58	206.3192	4.58	172.7303	4.58	172.1497
4.6	192.1035	4.6	154.1214	4.6	179.7776
4.62	178.0544	4.62	179.9196	4.62	174.6521
4.64	186.9902	4.64	180.038	4.64	167.816
4.66	181.5232	4.66	148.4218	4.66	167.0362
4.68	173.5695	4.68	155.9564	4.68	154.1925
4.7	177.9597	4.7	163.6144	4.7	172.036
4.72	196.4227	4.72	181.2693	4.72	141.969
4.74	180.361	4.74	193.2655	4.74	144.1856
4.76	151.566	4.76	162.4958	4.76	161.8092
4.78	140.9286	4.78	161.5664	4.78	158.1278
4.8	155.1142	4.8	184.7221	4.8	161.0819
4.82	172.6688	4.82	176.96	4.82	145.277
4.84	167.7585	4.84	155.7772	4.84	128.9746
4.86	172.5348	4.86	149.2465	4.86	140.5098
4.88	150.1016	4.88	148.2162	4.88	145.2022
4.9	150.3322	4.9	162.0433	4.9	154.3966
4.92	147.6811	4.92	148.1701	4.92	152.9909
4.94	183.2186	4.94	153.7348	4.94	134.7445
4.96	128.8053	4.96	162.9557	4.96	164.9358
4.98	168.8731	4.98	144.2235	4.98	134.5123
5	156.9549	5	155.0518	5	140.0044
5.02	143.0576	5.02	152.7421	5.02	139.5676
5.04	158.8125	5.04	157.3544	5.04	133.9883
5.06	143.1718	5.06	139.1584	5.06	127.5287
5.08	153.5489	5.08	137.3283	5.08	140.0963
5.1	137.2292	5.1	154.3862	5.1	135.0744
5.12	141.4456	5.12	124.0719	5.12	149.1473
5.14	157.1188	5.14	142.8824	5.14	133.5251
5.16	153.1446	5.16	157.4744	5.16	127.5487
5.18	139.1587	5.18	135.9651	5.18	137.7715
5.2	139.0962	5.2	137.8214	5.2	137.8521
5.22	141.2007	5.22	120.2123	5.22	131.611
5.24	147.2228	5.24	129.9866	5.24	133.3853
5.26	145.5728	5.26	163.9779	5.26	127.1698
5.28	117.2792	5.28	146.5763	5.28	122.2983
5.3	123.2008	5.3	129.4371	5.3	122.79
5.32	136.5533	5.32	147.2938	5.32	113.6351
5.34	149.777	5.34	108.6678	5.34	119.7379
5.36	144.3434	5.36	124.7133	5.36	115.8402
5.38	108.8752	5.38	120.8846	5.38	134.0779
5.4	122.7849	5.4	112.3381	5.4	121.7598
5.42	134.9287	5.42	130.6651	5.42	119.1744
5.44	142.1187	5.44	125.1813	5.44	141.7495
5.46	154.4359	5.46	124.0277	5.46	131.2833
5.48	113.2504	5.48	104.4501	5.48	128.8619
5.5	116.1478	5.5	103.5536	5.5	112.9222
5.52	129.6422	5.52	109.4492	5.52	124.1439
5.54	126.0605	5.54	114.1285	5.54	112.8222
5.56	134.6745	5.56	113.5587	5.56	129.0448
5.58	111.5456	5.58	114.8673	5.58	130.1768
5.6	117.7319	5.6	125.4956	5.6	123.0112
5.62	123.1038	5.62	98.616	5.62	109.6692
5.64	124.9931	5.64	108.2439	5.64	104.3848
5.66	114.2631	5.66	107.4438	5.66	125.2353
5.68	109.0617	5.68	113.5095	5.68	143.8895
5.7	117.3158	5.7	129.8464	5.7	121.955
5.72	85.8108	5.72	122.6315	5.72	118.759
5.74	92.7209	5.74	108.2151	5.74	108.3123
5.76	114.5638	5.76	122.8368	5.76	119.7222
5.78	100.9582	5.78	118.2238	5.78	124.7063
5.8	130.6489	5.8	98.7324	5.8	132.8613
5.82	123.2583	5.82	123.1416	5.82	119.506
5.84	111.4355	5.84	111.4594	5.84	83.2831
5.86	91.3796	5.86	109.7219	5.86	104.461
5.88	120.3422	5.88	93.2048	5.88	98.1372
5.9	116.7926	5.9	128.2583	5.9	101.1169
5.92	101.9541	5.92	90.1823	5.92	111.7669
5.94	114.4542	5.94	102.5422	5.94	116.0087
5.96	115.8919	5.96	113.3323	5.96	101.9472
5.98	113.3783	5.98	94.5849	5.98	85.493
6	93.3769	6	114.6545	6	99.4139
6.02	99.5715	6.02	99.1221	6.02	96.7394
6.04	100.6754	6.04	107.8344	6.04	105.4618
6.06	104.7943	6.06	114.8752	6.06	109.1862
6.08	99.955	6.08	102.6392	6.08	100.607
6.1	96.3333	6.1	94.5533	6.1	111.2604
6.12	86.9502	6.12	96.2757	6.12	108.6612
6.14	109.7703	6.14	97.9141	6.14	104.5109
6.16	95.7986	6.16	94.1736	6.16	119.3777
6.18	96.3966	6.18	116.1518	6.18	117.3616
6.2	110.8956	6.2	103.4837	6.2	86.4449
6.22	100.3327	6.22	93.1782	6.22	83.6946
6.24	94.8076	6.24	92.1526	6.24	100.0551
6.26	91.507	6.26	90.697	6.26	114.7553
6.28	98.4519	6.28	90.0296	6.28	100.8901
6.3	96.5205	6.3	76.7	6.3	82.6121
6.32	86.0484	6.32	90.065	6.32	81.7636
6.34	112.7145	6.34	94.3565	6.34	86.091
6.36	96.8778	6.36	101.7361	6.36	90.8865
6.38	87.1693	6.38	95.8393	6.38	98.2376
6.4	85.0499	6.4	72.4716	6.4	84.8769
6.42	104.8941	6.42	98.0408	6.42	96.6606
6.44	93.9352	6.44	93.9637	6.44	97.1894
6.46	108.27	6.46	87.8643	6.46	90.8256
6.48	91.7718	6.48	93.9225	6.48	81.4136
6.5	95.8702	6.5	81.9377	6.5	91.234
6.52	95.4326	6.52	78.287	6.52	90.0809
6.54	73.0913	6.54	82.8668	6.54	85.6989
6.56	83.4063	6.56	90.02	6.56	106.2533
6.58	75.7195	6.58	81.942	6.58	101.2314
6.6	71.7252	6.6	94.7558	6.6	83.6228
6.62	70.5943	6.62	75.481	6.62	88.9907
6.64	93.6019	6.64	83.5301	6.64	89.9228
6.66	73.6835	6.66	80.0677	6.66	69.9839
6.68	82.884	6.68	90.1793	6.68	112.6644
6.7	63.9219	6.7	85.6679	6.7	78.6355
6.72	75.5207	6.72	93.1167	6.72	69.532
6.74	65.3503	6.74	91.5446	6.74	103.0632
6.76	74.5253	6.76	93.2806	6.76	88.5509
6.78	76.1551	6.78	75.0078	6.78	80.5022
6.8	79.0164	6.8	76.3666	6.8	94.7227
6.82	63.7895	6.82	86.1607	6.82	84.4267
6.84	92.0456	6.84	75.3212	6.84	83.5739
6.86	86.581	6.86	75.0225	6.86	83.1382
6.88	71.775	6.88	75.6857	6.88	67.1749
6.9	82.1345	6.9	72.6302	6.9	83.3455
6.92	81.8608	6.92	80.0671	6.92	87.2157
6.94	73.0733	6.94	80.8066	6.94	85.482
6.96	102.5361	6.96	70.6131	6.96	97.1218
6.98	69.4514	6.98	67.9285	6.98	68.6502
7	101.7767	7	92.6258	7	68.8125
7.02	76.0544	7.02	69.6018	7.02	76.3709
7.04	86.0396	7.04	78.0563	7.04	77.0167
7.06	92.4904	7.06	65.991	7.06	92.9047
7.08	81.6279	7.08	73.7134	7.08	94.3809
7.1	73.3035	7.1	84.218	7.1	75.2954
7.12	63.4133	7.12	86.0389	7.12	64.5877
7.14	77.5875	7.14	83.8495	7.14	66.249
7.16	69.0151	7.16	68.8014	7.16	90.4427
7.18	88.4098	7.18	77.4806	7.18	83.2712
7.2	79.885	7.2	67.5197	7.2	76.9642
7.22	81.0178	7.22	78.1035	7.22	64.5731
7.24	63.6157	7.24	83.6404	7.24	69.3758
7.26	67.4322	7.26	60.2749	7.26	79.5355
7.28	77.9587	7.28	76.3945	7.28	70.9781
7.3	80.4182	7.3	74.0927	7.3	64.8052
7.32	75.8172	7.32	77.3016	7.32	80.3192
7.34	73.0857	7.34	84.8239	7.34	70.8106
7.36	72.6074	7.36	60.0403	7.36	70.8641
7.38	86.4256	7.38	58.9143	7.38	78.4985
7.4	63.374	7.4	86.6196	7.4	73.4721
7.42	70.1419	7.42	93.0804	7.42	79.4186
7.44	73.8389	7.44	79.2291	7.44	72.6648
7.46	70.4267	7.46	64.9076	7.46	71.7708
7.48	76.783	7.48	53.4493	7.48	60.7622
7.5	75.8897	7.5	62.5683	7.5	78.5519
7.52	74.7908	7.52	71.6587	7.52	67.4234
7.54	70.6867	7.54	64.9365	7.54	69.4755
7.56	77.1778	7.56	60.3618	7.56	62.2174
7.58	73.5641	7.58	69.8764	7.58	78.1024
7.6	71.5364	7.6	50.7978	7.6	76.628
7.62	76.794	7.62	61.1194	7.62	65.6739
7.64	54.2895	7.64	70.4378	7.64	68.5367
7.66	67.0564	7.66	61.6558	7.66	49.7823
7.68	76.9208	7.68	70.9778	7.68	77.1307
7.7	59.108	7.7	78.5513	7.7	57.6641
7.72	61.4844	7.72	71.2464	7.72	84.3569
7.74	73.2425	7.74	48.5338	7.74	62.4967
7.76	71.9485	7.76	65.7138	7.76	70.8423
7.78	52.0665	7.78	66.3801	7.78	68.7386
7.8	64.8534	7.8	68.1925	7.8	68.9658
7.82	59.2627	7.82	68.7603	7.82	76.9586
7.84	53.3413	7.84	58.0566	7.84	68.7893
7.86	60.7859	7.86	66.8988	7.86	66.6418
7.88	54.0916	7.88	47.0992	7.88	65.4252
7.9	55.3788	7.9	63.8896	7.9	64.287
7.92	47.4101	7.92	63.9446	7.92	69.4809
7.94	71.945	7.94	63.6762	7.94	72.6426
7.96	78.5452	7.96	61.2062	7.96	78.0328
7.98	68.6165	7.98	58.3375	7.98	48.499
8	62.7656	8	57.7378	8	71.5867